A semiconductor equipment company in the Atomic Layer Deposition (ALD) market approached BCE in need of a custom high temperature heater solution. Their application involved a thin-film deposition using a sequence of various chemical processes. Repeating these processes results in a thin film being slowly deposited.
BCE produced a highly effective high temperature heater with exceptional uniformity. The design was able to compress the internal element enough to allow for optimal temperature transfer. The weld around the outside periphery of the base plate and the (3) lift–pin-hole-standoffs were essential in the design for vacuum integrity, ramp rate, and temperature stability.